中国发明专利：光致弯曲膜驱动型微泵

发明（设计）人：俞燕蕾，朱玉田，李晓英，章园园，陈茂林，邢星，黄海涛，刘恒

申请人：复旦大学

专利号：ZL 200910199053.X

摘要：

本发明属于微机械技术领域,具体为一种光致弯曲膜驱动型微泵,该微泵的主结构由泵膜、泵腔、入口和出口等组成。该微泵的泵膜由光致弯曲形变材料层和柔性高分子材料层局部复合组成,通过周期性地照射紫外光和可见光,使泵膜发生周期性的凸起和回复。具有结构和工艺简单,功耗小,易操控,寿命长的特点。

Abstract:

The invention discloses a driving micro pump of a photoinduced bending film, which belongs to the technical field of micro mechanics. The micro pump mainly comprises a pump film, a pump cavity, an inlet, an outlet and the like, wherein the pump film of the micro pump is formed by partially compounding a photoinduced bending deforming material layer and a flexible polymer material layer; and the pump film periodically heaves and restores by periodically irradiating ultraviolet light and visible light. The driving micro pump has the advantages of simple structure and process, low power consumption, easy operation and control and long service life.